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Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing

Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO...

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Detalles Bibliográficos
Autores principales: Miyazaki, Hideki T, Kasaya, Takeshi, Oosato, Hirotaka, Sugimoto, Yoshimasa, Choi, Bongseok, Iwanaga, Masanobu, Sakoda, Kazuaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099843/
https://www.ncbi.nlm.nih.gov/pubmed/27877806
http://dx.doi.org/10.1088/1468-6996/16/3/035005