Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing

Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO...

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Detalles Bibliográficos
Autores principales: Miyazaki, Hideki T, Kasaya, Takeshi, Oosato, Hirotaka, Sugimoto, Yoshimasa, Choi, Bongseok, Iwanaga, Masanobu, Sakoda, Kazuaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2015
Materias:
Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099843/
https://www.ncbi.nlm.nih.gov/pubmed/27877806
http://dx.doi.org/10.1088/1468-6996/16/3/035005
Descripción
Sumario:Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO(2) sensing. In this planar Au/Al(2)O(3)/Au metasurface emitter, orthogonal rectangular Au patches are arrayed alternately and exhibit nearly perfect blackbody emission at 4.26 and 3.95 μm necessary for CO(2) monitoring at the electric power reduced by 31%. The results demonstrate that metasurface infrared thermal emitters are almost ready for commercialization.

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