Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing

Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO...

Descripción completa

Detalles Bibliográficos
Autores principales: Miyazaki, Hideki T, Kasaya, Takeshi, Oosato, Hirotaka, Sugimoto, Yoshimasa, Choi, Bongseok, Iwanaga, Masanobu, Sakoda, Kazuaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2015
Materias:
Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099843/
https://www.ncbi.nlm.nih.gov/pubmed/27877806
http://dx.doi.org/10.1088/1468-6996/16/3/035005
_version_ 1782466013423468544
author Miyazaki, Hideki T
Kasaya, Takeshi
Oosato, Hirotaka
Sugimoto, Yoshimasa
Choi, Bongseok
Iwanaga, Masanobu
Sakoda, Kazuaki
author_facet Miyazaki, Hideki T
Kasaya, Takeshi
Oosato, Hirotaka
Sugimoto, Yoshimasa
Choi, Bongseok
Iwanaga, Masanobu
Sakoda, Kazuaki
author_sort Miyazaki, Hideki T
collection PubMed
description Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO(2) sensing. In this planar Au/Al(2)O(3)/Au metasurface emitter, orthogonal rectangular Au patches are arrayed alternately and exhibit nearly perfect blackbody emission at 4.26 and 3.95 μm necessary for CO(2) monitoring at the electric power reduced by 31%. The results demonstrate that metasurface infrared thermal emitters are almost ready for commercialization.
format Online
Article
Text
id pubmed-5099843
institution National Center for Biotechnology Information
language English
publishDate 2015
publisher Taylor & Francis
record_format MEDLINE/PubMed
spelling pubmed-50998432016-11-22 Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing Miyazaki, Hideki T Kasaya, Takeshi Oosato, Hirotaka Sugimoto, Yoshimasa Choi, Bongseok Iwanaga, Masanobu Sakoda, Kazuaki Sci Technol Adv Mater Papers Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO(2) sensing. In this planar Au/Al(2)O(3)/Au metasurface emitter, orthogonal rectangular Au patches are arrayed alternately and exhibit nearly perfect blackbody emission at 4.26 and 3.95 μm necessary for CO(2) monitoring at the electric power reduced by 31%. The results demonstrate that metasurface infrared thermal emitters are almost ready for commercialization. Taylor & Francis 2015-05-20 /pmc/articles/PMC5099843/ /pubmed/27877806 http://dx.doi.org/10.1088/1468-6996/16/3/035005 Text en © 2015 National Institute for Materials Science http://creativecommons.org/licenses/by/3.0/ Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence (http://creativecommons.org/licenses/by/3.0/) . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
spellingShingle Papers
Miyazaki, Hideki T
Kasaya, Takeshi
Oosato, Hirotaka
Sugimoto, Yoshimasa
Choi, Bongseok
Iwanaga, Masanobu
Sakoda, Kazuaki
Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title_full Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title_fullStr Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title_full_unstemmed Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title_short Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
title_sort ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared co(2) sensing
topic Papers
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099843/
https://www.ncbi.nlm.nih.gov/pubmed/27877806
http://dx.doi.org/10.1088/1468-6996/16/3/035005
work_keys_str_mv AT miyazakihidekit ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT kasayatakeshi ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT oosatohirotaka ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT sugimotoyoshimasa ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT choibongseok ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT iwanagamasanobu ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing
AT sakodakazuaki ultravioletnanoimprintedpackagedmetasurfacethermalemittersforinfraredco2sensing

Ejemplares similares