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Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO(2) sensing
Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Taylor & Francis
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099843/ https://www.ncbi.nlm.nih.gov/pubmed/27877806 http://dx.doi.org/10.1088/1468-6996/16/3/035005 |