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Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition

In this work, the thermal stability and the oxidation and tribological behavior of nanoporous a-BC:H films are studied and compared with those in conventional diamond-like carbon (DLC) films. a-BC:H films were deposited by pulsed plasma chemical vapor deposition using B(CH(3))(3) gas as the boron so...

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Detalles Bibliográficos
Autores principales: Liza, Shahira, Ohtake, Naoto, Akasaka, Hiroki, Munoz-Guijosa, Juan M
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099845/
https://www.ncbi.nlm.nih.gov/pubmed/27877808
http://dx.doi.org/10.1088/1468-6996/16/3/035007