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A review of molecular beam epitaxy of ferroelectric BaTiO(3) films on Si, Ge and GaAs substrates and their applications
SrTiO(3) epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the route to the monolithic integration of various complex oxides on the complementary metal-oxide–semiconductor silicon platform. Among functional oxides, ferroelectric perovskite oxides offer promising perspectives...
Autores principales: | Mazet, Lucie, Yang, Sang Mo, Kalinin, Sergei V, Schamm-Chardon, Sylvie, Dubourdieu, Catherine |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Taylor & Francis
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099853/ https://www.ncbi.nlm.nih.gov/pubmed/27877816 http://dx.doi.org/10.1088/1468-6996/16/3/036005 |
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