Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

The decreasing size of semiconductor features and the increasing structural complexity of advanced devices have placed continuously greater demands on manufacturing metrology, arising both from the measurement challenges of smaller feature sizes and the growing requirement to characterize structures...

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Detalles Bibliográficos
Autores principales: Choi, Jinho, Park, Byong Chon, Ahn, Sang Jung, Kim, Dal-Hyun, Lyou, Joon, Dixson, Ronald G., Orji, Ndubuisi G., Fu, Joseph, Vorburger, Theodore V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5103326/
https://www.ncbi.nlm.nih.gov/pubmed/27840664
http://dx.doi.org/10.1117/1.JMM.15.3.034005

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5103326/
https://www.ncbi.nlm.nih.gov/pubmed/27840664
http://dx.doi.org/10.1117/1.JMM.15.3.034005

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