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Evaluation of carbon nanotube probes in critical dimension atomic force microscopes
The decreasing size of semiconductor features and the increasing structural complexity of advanced devices have placed continuously greater demands on manufacturing metrology, arising both from the measurement challenges of smaller feature sizes and the growing requirement to characterize structures...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5103326/ https://www.ncbi.nlm.nih.gov/pubmed/27840664 http://dx.doi.org/10.1117/1.JMM.15.3.034005 |