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Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch‐Mask Applications
A parallel nanolithographic patterning method is presented that can be used to obtain arrays of multifunctional nanoparticles. These patterns can simply be converted into a variety of secondary nanopatterns that are useful for nanolithographic imprint, plasmonic, and etch‐mask applications. [Image:...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
John Wiley and Sons Inc.
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5115431/ https://www.ncbi.nlm.nih.gov/pubmed/27980957 http://dx.doi.org/10.1002/advs.201500016 |