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All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition
Thin films of stable metal-organic frameworks (MOFs) such as UiO-66 have enormous application potential, for instance in microelectronics. However, all-gas-phase deposition techniques are currently not available for such MOFs. We here report on thin-film deposition of the thermally and chemically st...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5123030/ https://www.ncbi.nlm.nih.gov/pubmed/27876797 http://dx.doi.org/10.1038/ncomms13578 |