An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperat...

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Detalles Bibliográficos
Autores principales: Mansoor, Mohtashim, Haneef, Ibraheem, Akhtar, Suhail, Rafiq, Muhammad Aftab, De Luca, Andrea, Ali, Syed Zeeshan, Udrea, Florin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134430/
https://www.ncbi.nlm.nih.gov/pubmed/27827904
http://dx.doi.org/10.3390/s16111608

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134430/
https://www.ncbi.nlm.nih.gov/pubmed/27827904
http://dx.doi.org/10.3390/s16111608

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