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One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements

This paper describes a one-port mechanical resonance detection scheme utilized on a piezoelectric thin film driven silicon circular diaphragm resonator and discusses the limitations to such an approach in degenerate mode mass detection sensors. The sensor utilizes degenerated vibration modes of a ra...

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Detalles Bibliográficos
Autores principales: Hu, Zhongxu, Hedley, John, Keegan, Neil, Spoors, Julia, Gallacher, Barry, McNeil, Calum
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134440/
https://www.ncbi.nlm.nih.gov/pubmed/27792154
http://dx.doi.org/10.3390/s16111781