Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties

With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-se...

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Detalles Bibliográficos
Autores principales: Janusas, Giedrius, Ponelyte, Sigita, Brunius, Alfredas, Guobiene, Asta, Vilkauskas, Andrius, Palevicius, Arvydas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134552/
https://www.ncbi.nlm.nih.gov/pubmed/27834910
http://dx.doi.org/10.3390/s16111893

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134552/
https://www.ncbi.nlm.nih.gov/pubmed/27834910
http://dx.doi.org/10.3390/s16111893

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