Profilometry of thin films on rough substrates by Raman spectroscopy

Thin, light-absorbing films attenuate the Raman signal of underlying substrates. In this article, we exploit this phenomenon to develop a contactless thickness profiling method for thin films deposited on rough substrates. We demonstrate this technique by probing profiles of thin amorphous silicon s...

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Detalles Bibliográficos
Autores principales: Ledinský, Martin, Paviet-Salomon, Bertrand, Vetushka, Aliaksei, Geissbühler, Jonas, Tomasi, Andrea, Despeisse, Matthieu, De Wolf , Stefaan, Ballif , Christophe, Fejfar, Antonín
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5138622/
https://www.ncbi.nlm.nih.gov/pubmed/27922033
http://dx.doi.org/10.1038/srep37859

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5138622/
https://www.ncbi.nlm.nih.gov/pubmed/27922033
http://dx.doi.org/10.1038/srep37859

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