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In situ size sorting in CVD synthesis of Si microspheres
Silicon microspheres produced in gas-phase by hot-wall CVD offer unique quality in terms of sphericity, surface smoothness, and size. However, the spheres produced are polydisperse in size, which typically range from 0.5 μm to 5 μm. In this work we show through experiments and calculations that ther...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5144007/ https://www.ncbi.nlm.nih.gov/pubmed/27929055 http://dx.doi.org/10.1038/srep38719 |