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Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate
In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O(2)/Ar gas flow ratio during channel deposition on the electrical p...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5150528/ https://www.ncbi.nlm.nih.gov/pubmed/27941915 http://dx.doi.org/10.1038/srep38984 |