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Determination of electrostatic force and its characteristics based on phase difference by amplitude modulation atomic force microscopy
Electrostatic force measurement at the micro/nano scale is of great significance in science and engineering. In this paper, a reasonable way of applying voltage is put forward by taking an electrostatic chuck in a real integrated circuit manufacturing process as a sample, applying voltage in the pro...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5153390/ https://www.ncbi.nlm.nih.gov/pubmed/27957727 http://dx.doi.org/10.1186/s11671-016-1765-2 |