Low-temperature remote plasma enhanced atomic layer deposition of ZrO(2)/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Encapsulation is essential to protect the air-sensitive components of organic light-emitting diodes (OLEDs) such as active layers and cathode electrodes. In this study, hybrid zirconium inorganic/organic nanolaminates were fabricated using remote plasma enhanced atomic layer deposition (PEALD) and m...

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Detalles Bibliográficos
Autores principales: Chen, Zheng, Wang, Haoran, Wang, Xiao, Chen, Ping, Liu, Yunfei, Zhao, Hongyu, Zhao, Yi, Duan, Yu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5216332/
https://www.ncbi.nlm.nih.gov/pubmed/28059160
http://dx.doi.org/10.1038/srep40061

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5216332/
https://www.ncbi.nlm.nih.gov/pubmed/28059160
http://dx.doi.org/10.1038/srep40061

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