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Low-temperature remote plasma enhanced atomic layer deposition of ZrO(2)/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Encapsulation is essential to protect the air-sensitive components of organic light-emitting diodes (OLEDs) such as active layers and cathode electrodes. In this study, hybrid zirconium inorganic/organic nanolaminates were fabricated using remote plasma enhanced atomic layer deposition (PEALD) and m...

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Detalles Bibliográficos
Autores principales:	Chen, Zheng, Wang, Haoran, Wang, Xiao, Chen, Ping, Liu, Yunfei, Zhao, Hongyu, Zhao, Yi, Duan, Yu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5216332/ https://www.ncbi.nlm.nih.gov/pubmed/28059160 http://dx.doi.org/10.1038/srep40061

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