Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon

The effect of crystal plane orientation on tribochemical removal of monocrystalline silicon was investigated using an atomic force microscope. Experimental results indicated that the tribochemical removal of silicon by SiO(2) microsphere presented strong crystallography-induced anisotropy. Further a...

Descripción completa

Detalles Bibliográficos
Autores principales: Xiao, Chen, Guo, Jian, Zhang, Peng, Chen, Cheng, Chen, Lei, Qian, Linmao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5233974/
https://www.ncbi.nlm.nih.gov/pubmed/28084433
http://dx.doi.org/10.1038/srep40750

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5233974/
https://www.ncbi.nlm.nih.gov/pubmed/28084433
http://dx.doi.org/10.1038/srep40750

Ejemplares similares