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Carbon elimination from silicon kerf: Thermogravimetric analysis and mechanistic considerations
40% of ultrapure silicon is lost as kerf during slicing to produce wafers. Kerf is currently not being recycled due to engineering challenges and costs associated with removing its abundant impurities. Carbon left behind from the lubricant remains as one of the most difficult contaminants to remove...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5241785/ https://www.ncbi.nlm.nih.gov/pubmed/28098187 http://dx.doi.org/10.1038/srep40535 |