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Carbon elimination from silicon kerf: Thermogravimetric analysis and mechanistic considerations

40% of ultrapure silicon is lost as kerf during slicing to produce wafers. Kerf is currently not being recycled due to engineering challenges and costs associated with removing its abundant impurities. Carbon left behind from the lubricant remains as one of the most difficult contaminants to remove...

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Detalles Bibliográficos
Autores principales: Vazquez-Pufleau, Miguel, Chadha, Tandeep S., Yablonsky, Gregory, Biswas, Pratim
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5241785/
https://www.ncbi.nlm.nih.gov/pubmed/28098187
http://dx.doi.org/10.1038/srep40535