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Resist-free antireflective nanostructured film fabricated by thermal-NIL
Resist-free antireflective (AR) nanostructured films are directly fabricated on polycarbonate (PC) film using thermal-nanoimprint lithography (T-NIL) and the moth-eye shape of AR nanostructure is elaborately optimized with different oxygen reactive ion etching conditions. Anodic aluminum oxide (AAO)...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Korea Nano Technology Research Society
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5271020/ https://www.ncbi.nlm.nih.gov/pubmed/28191399 http://dx.doi.org/10.1186/s40580-014-0019-1 |