Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating ele...

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Detalles Bibliográficos
Autores principales: Tommasi, Alessio, Cocuzza, Matteo, Perrone, Denis, Pirri, Candido Fabrizio, Mosca, Roberto, Villani, Marco, Delmonte, Nicola, Zappettini, Andrea, Calestani, Davide, Marasso, Simone Luigi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298635/
https://www.ncbi.nlm.nih.gov/pubmed/28042839
http://dx.doi.org/10.3390/s17010062

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298635/
https://www.ncbi.nlm.nih.gov/pubmed/28042839
http://dx.doi.org/10.3390/s17010062

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