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Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications
In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating ele...
Autores principales: | Tommasi, Alessio, Cocuzza, Matteo, Perrone, Denis, Pirri, Candido Fabrizio, Mosca, Roberto, Villani, Marco, Delmonte, Nicola, Zappettini, Andrea, Calestani, Davide, Marasso, Simone Luigi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298635/ https://www.ncbi.nlm.nih.gov/pubmed/28042839 http://dx.doi.org/10.3390/s17010062 |
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