Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the intern...

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Detalles Bibliográficos
Autores principales: Yan, Han, Zhang, Wen-Ming, Jiang, Hui-Ming, Hu, Kai-Ming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298687/
https://www.ncbi.nlm.nih.gov/pubmed/28075344
http://dx.doi.org/10.3390/s17010114

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298687/
https://www.ncbi.nlm.nih.gov/pubmed/28075344
http://dx.doi.org/10.3390/s17010114

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