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Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation
In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the intern...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298687/ https://www.ncbi.nlm.nih.gov/pubmed/28075344 http://dx.doi.org/10.3390/s17010114 |