Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates

In this study, Ga(2)O(3)-doped ZnO (GZO) thin films were deposited on glass and flexible polyimide (PI) substrates at room temperature (300 K), 373 K, and 473 K by the radio frequency (RF) magnetron sputtering method. After finding the deposition rate, all the GZO thin films with a nano-scale thickn...

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Detalles Bibliográficos
Autores principales: Wang, Fang-Hsing, Chen, Kun-Neng, Hsu, Chao-Ming, Liu, Min-Chu, Yang, Cheng-Fu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5302505/
https://www.ncbi.nlm.nih.gov/pubmed/28335216
http://dx.doi.org/10.3390/nano6050088

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5302505/
https://www.ncbi.nlm.nih.gov/pubmed/28335216
http://dx.doi.org/10.3390/nano6050088

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