CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure

Photonic crystal (PC)-based devices have been widely used since 1990s, while PC has just stepped into the research area of nanofluidic. In this paper, photonic crystal had been used as a complementary metal oxide semiconductors (CMOS) compatible part to create a nanofluidic structure. A nanofluidic...

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Detalles Bibliográficos
Autores principales: Peng, Wang, Chen, Youping, Ai, Wu, Zhang, Dailin, Song, Han, Xiong, Hui, Huang, Pengcheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5307410/
https://www.ncbi.nlm.nih.gov/pubmed/28209025
http://dx.doi.org/10.1186/s11671-017-1849-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5307410/
https://www.ncbi.nlm.nih.gov/pubmed/28209025
http://dx.doi.org/10.1186/s11671-017-1849-7

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