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CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure
Photonic crystal (PC)-based devices have been widely used since 1990s, while PC has just stepped into the research area of nanofluidic. In this paper, photonic crystal had been used as a complementary metal oxide semiconductors (CMOS) compatible part to create a nanofluidic structure. A nanofluidic...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5307410/ https://www.ncbi.nlm.nih.gov/pubmed/28209025 http://dx.doi.org/10.1186/s11671-017-1849-7 |