Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry

The use of the ellipsometer for the measurement of the thickness and refractive index of very thin films is reviewed. The Poincaré sphere representation of the state of polarization of light is developed and used to describe the reflection process. Details of the operation of the ellipsometer are ex...

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Detalles Bibliográficos
Autores principales: McCrackin, Frank L., Passaglia, Elio, Stromberg, Robert R., Steinberg, Harold L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1963
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5317232/
https://www.ncbi.nlm.nih.gov/pubmed/31580576
http://dx.doi.org/10.6028/jres.067A.040

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5317232/
https://www.ncbi.nlm.nih.gov/pubmed/31580576
http://dx.doi.org/10.6028/jres.067A.040

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