RBS Depth Profiling Analysis of (Ti, Al)N/MoN and CrN/MoN Multilayers

(Ti, Al)N/MoN and CrN/MoN multilayered films were synthesized on Si (100) surface by multi-cathodic arc ion plating system with various bilayer periods. The elemental composition and depth profiling of the films were investigated by Rutherford backscattering spectroscopy (RBS) using 2.42 and 1.52 Me...

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Detalles Bibliográficos
Autores principales: Han, Bin, Wang, Zesong, Devi, Neena, Kondamareddy, K. K., Wang, Zhenguo, Li, Na, Zuo, Wenbin, Fu, Dejun, Liu, Chuansheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5332315/
https://www.ncbi.nlm.nih.gov/pubmed/28253563
http://dx.doi.org/10.1186/s11671-017-1921-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5332315/
https://www.ncbi.nlm.nih.gov/pubmed/28253563
http://dx.doi.org/10.1186/s11671-017-1921-3

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