Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal struc...

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Detalles Bibliográficos
Autores principales: Chen, Tao, Wang, Yaqiong, Liu, Huicong, Yang, Zhan, Wang, Pengbo, Sun, Lining
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5335975/
https://www.ncbi.nlm.nih.gov/pubmed/28134854
http://dx.doi.org/10.3390/s17020257

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5335975/
https://www.ncbi.nlm.nih.gov/pubmed/28134854
http://dx.doi.org/10.3390/s17020257

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