Cargando…
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal struc...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5335975/ https://www.ncbi.nlm.nih.gov/pubmed/28134854 http://dx.doi.org/10.3390/s17020257 |