Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processi...

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Detalles Bibliográficos
Autores principales: Jaramillo, Juan, Zarzycki, Artur, Galeano, July, Sandoz, Patrick
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5336059/
https://www.ncbi.nlm.nih.gov/pubmed/28146126
http://dx.doi.org/10.3390/s17020278

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5336059/
https://www.ncbi.nlm.nih.gov/pubmed/28146126
http://dx.doi.org/10.3390/s17020278

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