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Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography
This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5336059/ https://www.ncbi.nlm.nih.gov/pubmed/28146126 http://dx.doi.org/10.3390/s17020278 |