Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon

Solar cells based on epitaxial silicon layers as the absorber attract increasing attention because of the potential cost reduction. In this work, we studied the influence of the deposition rate on the structural properties of epitaxial silicon layers produced by plasma-enhanced chemical vapor deposi...

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Detalles Bibliográficos
Autores principales: Chen, Wanghua, Cariou, Romain, Hamon, Gwenaëlle, Léal, Ronan, Maurice, Jean-Luc, Cabarrocas, Pere Roca i
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5338295/
https://www.ncbi.nlm.nih.gov/pubmed/28262840
http://dx.doi.org/10.1038/srep43968

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5338295/
https://www.ncbi.nlm.nih.gov/pubmed/28262840
http://dx.doi.org/10.1038/srep43968

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