Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors

In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the...

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Detalles Bibliográficos
Autores principales: Liu, Xingpeng, Peng, Bin, Zhang, Wanli, Zhu, Jun, Liu, Xingzhao, Wei, Meng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5344621/
https://www.ncbi.nlm.nih.gov/pubmed/28772429
http://dx.doi.org/10.3390/ma10010069

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5344621/
https://www.ncbi.nlm.nih.gov/pubmed/28772429
http://dx.doi.org/10.3390/ma10010069

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