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Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO(2) Thin-Film
The effect of intrinsic stress on the structure and physical properties of silicon-tin-oxide (STO) films have been investigated. Since a state of tensile stress is available in as-deposited films, the value of stress can be exponentially enhanced when the annealing temperature is increased. The tens...
Autores principales: | , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5344632/ https://www.ncbi.nlm.nih.gov/pubmed/28772385 http://dx.doi.org/10.3390/ma10010024 |