Anodization-based process for the fabrication of all niobium nitride Josephson junction structures

We studied the growth and oxidation of niobium nitride (NbN) films that we used to fabricate superconductive tunnel junctions. The thin films were deposited by dc reactive magnetron sputtering using a mixture of argon and nitrogen. The process parameters were optimized by monitoring the plasma with...

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Detalles Bibliográficos
Autores principales: Lucci, Massimiliano, Ottaviani, Ivano, Cirillo, Matteo, De Matteis, Fabio, Francini, Roberto, Merlo, Vittorio, Davoli, Ivan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2017
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5355915/
https://www.ncbi.nlm.nih.gov/pubmed/28382243
http://dx.doi.org/10.3762/bjnano.8.58

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5355915/
https://www.ncbi.nlm.nih.gov/pubmed/28382243
http://dx.doi.org/10.3762/bjnano.8.58

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