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Effect of decomposition and organic residues on resistivity of copper films fabricated via low-temperature sintering of complex particle mixed dispersions
Mixtures of a copper complex and copper fine particles as copper-based metal-organic decomposition (MOD) dispersions have been demonstrated to be effective for low-temperature sintering of conductive copper film. However, the copper particle size effect on decomposition process of the dispersion dur...
Autores principales: | Yong, Yingqiong, Nguyen, Mai Thanh, Tsukamoto, Hiroki, Matsubara, Masaki, Liao, Ying-Chih, Yonezawa, Tetsu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5364527/ https://www.ncbi.nlm.nih.gov/pubmed/28338044 http://dx.doi.org/10.1038/srep45150 |
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