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Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing

We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of side...

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Detalles Bibliográficos
Autores principales: Fang, Zhiwei, Xu, Yingxin, Wang, Min, Qiao, Lingling, Lin, Jintian, Fang, Wei, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5372359/
https://www.ncbi.nlm.nih.gov/pubmed/28358135
http://dx.doi.org/10.1038/srep45610