Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology...

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Detalles Bibliográficos
Autores principales: Merlo, Sabina, Poma, Paolo, Crisà, Eleonora, Faralli, Dino, Soldo, Marco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375748/
https://www.ncbi.nlm.nih.gov/pubmed/28245603
http://dx.doi.org/10.3390/s17030462

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375748/
https://www.ncbi.nlm.nih.gov/pubmed/28245603
http://dx.doi.org/10.3390/s17030462

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