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Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology...

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Detalles Bibliográficos
Autores principales:	Merlo, Sabina, Poma, Paolo, Crisà, Eleonora, Faralli, Dino, Soldo, Marco
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375748/ https://www.ncbi.nlm.nih.gov/pubmed/28245603 http://dx.doi.org/10.3390/s17030462

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