Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

A novel micro-electro-mechanical systems (MEMS) inertial microswitch with a flexible contact-enhanced structure to extend the contact duration has been proposed in the present work. In order to investigate the stiffness k of the stationary electrodes, the stationary electrodes with different shapes,...

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Detalles Bibliográficos
Autores principales: Xu, Qiu, Yang, Zhuo-Qing, Fu, Bo, Bao, Yan-Ping, Wu, Hao, Sun, Yun-Na, Zhao, Meng-Yuan, Li, Jian, Ding, Gui-Fu, Zhao, Xiao-Lin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375813/
https://www.ncbi.nlm.nih.gov/pubmed/28272330
http://dx.doi.org/10.3390/s17030527

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375813/
https://www.ncbi.nlm.nih.gov/pubmed/28272330
http://dx.doi.org/10.3390/s17030527

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