Cargando…
Low on-resistance diamond field effect transistor with high-k ZrO(2) as dielectric
Although several high-k insulators have been deposited on the diamond for metal-insulator-semiconductor field effect transistors (MISFETs) fabrication, the k values and current output are still not fully satisfactory. Here, we present a high-k ZrO(2) layer on the diamond for the MISFETs. The k value...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2014
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5377369/ https://www.ncbi.nlm.nih.gov/pubmed/25242175 http://dx.doi.org/10.1038/srep06395 |