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Electronic Structure and Charge-Trapping Characteristics of the Al(2)O(3)-TiAlO-SiO(2) Gate Stack for Nonvolatile Memory Applications
In this work, high-k composite TiAlO film has been investigated as charge-trapping material for nonvolatile memory applications. The annealing formed Al(2)O(3)-TiAlO-SiO(2) dielectric stack demonstrates significant memory effects and excellent reliability properties. The memory device exhibits a lar...
Autores principales: | Xu, Wenchao, Zhang, Yang, Tang, Zhenjie, Shao, Zhengjie, Zhou, Guofu, Qin, Minghui, Zeng, Min, Wu, Sujuan, Zhang, Zhang, Gao, Jinwei, Lu, Xubing, Liu, Junming |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5391346/ https://www.ncbi.nlm.nih.gov/pubmed/28410556 http://dx.doi.org/10.1186/s11671-017-2040-x |
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