Modulation Doping of Silicon using Aluminium-induced Acceptor States in Silicon Dioxide

All electronic, optoelectronic or photovoltaic applications of silicon depend on controlling majority charge carriers via doping with impurity atoms. Nanoscale silicon is omnipresent in fundamental research (quantum dots, nanowires) but also approached in future technology nodes of the microelectron...

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Detalles Bibliográficos
Autores principales: König, Dirk, Hiller, Daniel, Gutsch, Sebastian, Zacharias, Margit, Smith, Sean
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5397979/
https://www.ncbi.nlm.nih.gov/pubmed/28425460
http://dx.doi.org/10.1038/srep46703

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5397979/
https://www.ncbi.nlm.nih.gov/pubmed/28425460
http://dx.doi.org/10.1038/srep46703

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