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Modulation Doping of Silicon using Aluminium-induced Acceptor States in Silicon Dioxide
All electronic, optoelectronic or photovoltaic applications of silicon depend on controlling majority charge carriers via doping with impurity atoms. Nanoscale silicon is omnipresent in fundamental research (quantum dots, nanowires) but also approached in future technology nodes of the microelectron...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5397979/ https://www.ncbi.nlm.nih.gov/pubmed/28425460 http://dx.doi.org/10.1038/srep46703 |