Attogram mass sensing based on silicon microbeam resonators

Using doubly-clamped silicon (Si) microbeam resonators, we demonstrate sub-attogram per Hertz (ag/Hz) mass sensitivity, which is extremely high sensitivity achieved by micro-scale MEMS mass sensors. We also characterize unusual buckling phenomena of the resonators. The thin-film based resonator is c...

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Detalles Bibliográficos
Autores principales: Baek, In-Bok, Byun, Sangwon, Lee, Bong Kuk, Ryu, Jin-Hwa, Kim, Yarkyeon, Yoon, Yong Sun, Jang, Won Ik, Lee, Seongjae, Yu, Han Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5399360/
https://www.ncbi.nlm.nih.gov/pubmed/28429793
http://dx.doi.org/10.1038/srep46660

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5399360/
https://www.ncbi.nlm.nih.gov/pubmed/28429793
http://dx.doi.org/10.1038/srep46660

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